1
Number of views:
1000

SRD Series

SRD series products are photovoltaic direct imaging research and development platforms with high precision analysis and high precision alignment, suitable for graphic research and development applications of high efficiency solar cells.
Retail price
0.0
Market price
0.0
Number of views:
1000
Product serial number
Quantity
-
+
Stock:
0
Product description
Parameters

1.Product Introduction

SRD series products are PV direct imaging R&D platforms with high-precision resolution and alignment, suitable for high-efficiency solar cell graphic R&D applications.
The system adopts DMD technology, which can realize better than 6μm fine lines through high-precision data analysis, and has good process adaptability to dry film, ink and photoresist, making it an economical and flexible R&D equipment platform.

 

2.Product Features

 

  • Direct writing lithography without mask, non-contact exposure process;
  • 405nm semiconductor laser, low exposure dose without substrate laser damage;
  • High resolution accuracy, better than 6 micron resolution accuracy.
  • Alignment accuracy: gripping edge alignment ± 0.05mm, Mark high-precision alignment ± 10μm.
  • Substrate size up to 300mm*300mm, suitable for 166~210 whole as well as half cells;
  • Automatic alignment function, compatible with gripping point and gripping edge alignment;
  • Multiple data input formats (GDSⅡ/DXF/Gerber etc.)
  • Windows-based system, user interface is easy to operate

 

3.Specification

 

 

Model PV SRD
06 08
Substrate size 166 mm~210mm Whole or half battery
Substrate thickness 80~150μm
Resolution 6μm 8μm
CDU ±10% ±10%
DOF ±30μm ±50μm
Alignment Edge alignment ±50μm
Mark alignment ±8μm
Edge alignment ±50μm
Mark alignment ±10μm
Light Source LD 405±10nm
Stitching ±1μm
Energy uniformity ≥95%
Light source lifetime 10000H

  *  After development, the minimum line width/line distance and depth of field depend on the characteristics of the photosensitive material and the process

Scan the QR code to read on your phone
We could not find any corresponding parameters, please add them to the properties table
Previous

Customer Support

Investor Relationship

Contact Us

Company Address:

CFMEE Park,789 Changning Avenue,High-Tech District,Hefei

Phone number:

+86-551-63823652

 

tp

Scan and follow us

Copyright ©2020 CFMEE