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LDW-D1
Retail price
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Number of views:
1000
Product serial number
Quantity
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Stock:
0
Product description
Parameters
1.Product Introduction
A high-end mass production equipment, using high-end spatial light modulation device data processing system, which can realize the needs of mass production with high resolution, high productivity and intelligent control. The equipment is mainly used in flat panel display, advanced packaging and other micro-nano processing fields.
2.Product Feature
- Mesh precision: 200nm
- Minimum line width: 700nm
- Basic size: 12inch (expandable)
- Exposure edge: optional
- Intelligent: automatic coding, code reading, docking MES system
3.Specification
| Model | LDW-D1 | |
|
Substrate size [inch]
|
300x300
|
|
|
Min. CD [nm]
|
700
|
|
|
Overlay [3σ,nm]
|
400
|
|
| Throughput [mm² /min] | 3000 | |
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Stock code：688630
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CFMEE Park，789 Changning Avenue，High-Tech District，Hefei
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